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Effects of Molybdenum Doping and Annealing on the Physical Properties of In2O3 Thin Films

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Published in 2017 at "Journal of Electronic Materials"

DOI: 10.1007/s11664-017-5687-2

Abstract: Molybdenum-doped In2O3 thin films with different atomic ratios of $$ y = \frac{{[{\text{Mo}}^{6 + } ]}}{{[{\hbox{In}}^{3 + } ]}} $$y=[Mo6+][In3+] = 0 at.%, 1 at.%, 3 at.%, 5 at.%, and 7 at.% have been prepared by spray pyrolysis. X-ray diffraction (XRD) analysis… read more here.

Keywords: thin films; molybdenum doping; thin film; effects molybdenum ... See more keywords