Method for improving measurement efficiency of lateral shearing interferometry
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DOI: 10.1117/1.oe.56.2.024107
Abstract: Abstract. The computation time of wavefront reconstruction is decreased by sampling the difference fronts in the present study. The wavefront can be reconstructed with high accuracy up to 64 Zernike terms with only 32×32 sampled… read more here.
Keywords: difference; efficiency lateral; measurement efficiency; shearing interferometry ... See more keywords