Design of an efficient illuminator for partially coherent sources in the extreme ultraviolet.
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DOI: 10.1364/ao.452204
Abstract: In this paper, the design of an efficient illuminator for extreme ultraviolet (EUV) applications such as photolithography, metrology, and microscopy is investigated. Illuminators are arrangements of optical components that allow us to tailor optical parameters… read more here.
Keywords: extreme ultraviolet; illuminator; efficient illuminator; illuminator partially ... See more keywords