AFM Tip Localization and Efficient Scanning Method for MEMS Inspection
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DOI: 10.1109/tim.2022.3175250
Abstract: Atomic force microscopy (AFM) is widely used in different fields, such as nanotechnology, semiconductor, microelectromechanical systems (MEMSs), bioscience, and so on. In the case of obtaining the 3-D topography of a large-scale MEMS sample, it… read more here.
Keywords: localization; scanning method; tip localization; afm tip ... See more keywords