Analysis of the Effect of UV-LIGA Fabrication Error on the Microspring Elastic Coefficient
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Access"
DOI: 10.1109/access.2019.2949386
Abstract: The manufacturing process of planar microsprings by the UV-LIGA process was introduced; the mechanism of fabrication error was analyzed from three process stages of exposure, SU-8 swelling, and corrosion; and the corresponding improvement measures were… read more here.
Keywords: elastic coefficient; line width; error; fabrication error ... See more keywords