MEMS Capacitive Microphones: Acoustical, Electrical, and Hidden Thermal-Related Issues
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DOI: 10.1109/jsen.2018.2837143
Abstract: This paper reports on the design and implementation of high performance MEMS microphones. The main parameters defining microphone performance, i.e., sensitivity, acoustic overload level, and signal-to-noise ratio, have been extracted from an acoustical–mechanical–electrical model of… read more here.
Keywords: microphones acoustical; electrical hidden; capacitive microphones; hidden thermal ... See more keywords