Annealing effect on electrical, nanomechanical and sensing properties of ZnO/Mo/ZnO nanofilms
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DOI: 10.1007/s00542-017-3615-2
Abstract: Multilayer film of zinc oxide (ZnO)/molybdenum (Mo)/ZnO was prepared by radio-frequency magnetron sputtering. We studied the optical, electrical, structural, nanomechanical properties, and sensing characteristics of ZnO/Mo/ZnO multilayer films. ZnO/Mo/ZnO films annealed temperatures about 500 °C had… read more here.
Keywords: nanomechanical sensing; effect electrical; electrical nanomechanical; annealing effect ... See more keywords