Temperature-Stable CMOS-MEMS Resonators via Arc-Beam-Induced Electrical Stiffness Tuning
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DOI: 10.1109/jmems.2025.3612313
Abstract: This paper presents a passive temperature compensation technique for CMOS-MEMS resonators, utilizing an arc-beam structure to induce temperature-dependent electrical stiffness. Implemented in a standard 0.35- $\mu $ m 2-poly-4-metal CMOS-MEMS process, the method achieves significant… read more here.
Keywords: temperature; arc beam; beam; electrical stiffness ... See more keywords