Electrical Trimming Characteristics of Polysilicon Nanofilms with Different Doping Concentrations and Deposition Temperatures
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DOI: 10.1155/2020/7379867
Abstract: Polysilicon nanofilm (PSNF) can provide a large gauge factor and good temperature stability, which promotes their application in piezoresistive sensing devices. Electrical trimming is necessary to further improve the stability and matching of piezoresistive resistors… read more here.
Keywords: different doping; doping concentrations; electrical trimming; concentrations deposition ... See more keywords