Experimental investigation of actuation in a micromachined electrically floating tunable capacitor
Sign Up to like & getrecommendations! Published in 2019 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2019.02.007
Abstract: Abstract In this paper, a tunable parallel plate capacitor with an electrically floating plate has been designed, micromachined and characterized. The device is fabricated from a single metal layer based on a low-cost standard process.… read more here.
Keywords: floating tunable; capacitor; electrically floating; experimental investigation ... See more keywords
Modeling and Characterization of Coaxial Through-Silicon Via With Electrically Floating Inner Silicon
Sign Up to like & getrecommendations! Published in 2017 at "IEEE Transactions on Components, Packaging and Manufacturing Technology"
DOI: 10.1109/tcpmt.2017.2678203
Abstract: In this paper, coaxial through-silicon via (C-TSV) is modeled and studied with the consideration of electrically floating inner silicon substrate. Nonlinear capacitances of the central via and the outer shielding shell are accurately captured by… read more here.
Keywords: inner silicon; silicon via; coaxial silicon; floating inner ... See more keywords