Microelectromechanical system-based electrochemical seismic sensors with an anode and a cathode integrated on one chip
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DOI: 10.1088/1361-6439/27/2/025004
Abstract: This paper presents a microelectromechanical system (MEMS)-based electrochemical seismic sensor with an anode and a cathode integrated on a single chip. The proposed approach decreases the number of requested wafers as the sensing unit from… read more here.
Keywords: anode cathode; microelectromechanical system; based electrochemical; electrochemical seismic ... See more keywords