Electrode Elastic Modulus as the Dominant Factor in the Capping Effect in Ferroelectric Hafnium Zirconium Oxide Thin Films
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DOI: 10.1021/acsami.4c15934
Abstract: The discovery of ferroelectricity in hafnia based thin films has catalyzed significant research focused on understanding the ferroelectric property origins and means to increase stability of the ferroelectric phase. Prior studies have revealed that biaxial… read more here.
Keywords: electrode elastic; cte; elastic modulus; effect ... See more keywords