Simple wet-etching technology for GaN using an electrodeless photo-assisted electrochemical reaction with a luminous array film as the UV source
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DOI: 10.7567/1882-0786/ab043c
Abstract: A simple setup for electrodeless photo-assisted electrochemical (PEC) etching was discussed from the viewpoint of the experimental geometry, in which the sample was dipped into the electrolyte under ultraviolet (UV) irradiation. Sulfate radicals () were… read more here.
Keywords: electrodeless photo; assisted electrochemical; photo assisted; wet etching ... See more keywords