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Published in 2021 at "Advanced Engineering Materials"
DOI: 10.1002/adem.202001293
Abstract: A novel approach is demonstrated that extends the resolution of 3D electroforming. Photoresist templates with complex 3D geometries are generated using two‐photon lithography are shrunken by a factor of ≈5 through pyrolysis. A key discovery…
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Keywords:
template pyrolysis;
electroforming template;
pyrolysis;
nanoscale electroforming ... See more keywords