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Published in 2023 at "Materials"
DOI: 10.3390/ma16114127
Abstract: This study investigates the effect of electrolytic plasma processing on the degree of defective layer removal from a damaged layer obtained after manufacturing operations. Electrical discharge machining (EDM) is widely accepted in modern industries for…
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Keywords:
processing;
investigation plasma;
plasma electrolytic;
processing edmed ... See more keywords
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Published in 2021 at "Micromachines"
DOI: 10.3390/mi12060606
Abstract: Single-crystal 4H-SiC is a typical third-generation semiconductor power-device material because of its excellent electronic and thermal properties. A novel polishing technique that combines plasma electrolytic processing and mechanical polishing (PEP-MP) was proposed in order to…
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Keywords:
crystal sic;
single crystal;
electrolytic processing;
plasma electrolytic ... See more keywords