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Published in 2021 at "Micromachines"
DOI: 10.3390/mi12101213
Abstract: In this paper, the effect of driving system on working performance of electromagnetic integrated scanning micromirror (ISM) is studied. To further improve the optimization design of the electromagnetic ISM, the detailed theoretical analysis, simulation analysis,…
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Keywords:
electromagnetic integrated;
ism;
working performance;
driving system ... See more keywords