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Published in 2023 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/acd8c4
Abstract: As a main component, membrane micropumps play a key role in developing microfluidic systems. This part pumps fluids by deflecting a membrane using a micro-actuator with a deflection range of a few micrometers during a…
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Keywords:
electromagnetic micropump;
stainless steel;
novel electromagnetic;
membrane ... See more keywords