Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code
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DOI: 10.1088/1361-6595/accecb
Abstract: Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conserving implicit fully electromagnetic particle-in-cell (PIC)/Monte Carlo code ECCOPIC2M. The code… read more here.
Keywords: coupled plasmas; capacitively coupled; particle cell; fully electromagnetic ... See more keywords