An electromagnetic scanning mirror integrated with blazed grating and angle sensor for a near infrared micro spectrometer
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DOI: 10.1088/1361-6439/aa85cd
Abstract: This work presents an electromagnetic scanning mirror integrated with blazed grating and an angle sensor for a near infrared micro spectrometer. This device is fabricated on an aluminum coated 7.9° off-oriented (1 1 1) silicon… read more here.
Keywords: electromagnetic scanning; micro spectrometer; infrared micro; near infrared ... See more keywords