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Published in 2019 at "Micromachines"
DOI: 10.3390/mi10110746
Abstract: The analysis of electromechanical energy converters based on metal-thin film ferroelectric (with a large specific capacitance)-nanogap-moving electrode structures was performed. It was shown that the density of the energy being converted and its absolute value…
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Keywords:
nanometer gap;
gap electromechanical;
energy;
density ... See more keywords