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Published in 2023 at "Applied Physics Reviews"
DOI: 10.1063/5.0139658
Abstract: The development of big data and artificial intelligence technology is increasing the need for electronic devices to become smaller, cheaper, and more energy efficient, while also having enhanced functionalities. However, the miniaturization of silicon chip…
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Keywords:
electromigration three;
three dimensional;
integrated circuits;
dimensional integrated ... See more keywords