Application of electron channeling contrast imaging to 3D semiconductor structures through proper detector configurations.
Sign Up to like & getrecommendations! Published in 2019 at "Ultramicroscopy"
DOI: 10.1016/j.ultramic.2019.112928
Abstract: Nowadays electron channeling contrast imaging (ECCI) is widely used to characterize crystalline defects on blanket semiconductors. Its further application in the semiconductor industry is however challenged by the emerging rise of nanoscale 3D heterostructures. In… read more here.
Keywords: contrast imaging; contrast; semiconductor; channeling contrast ... See more keywords
Orientation Mapping by Electron Channeling (OMEC) of Polycrystals Using a Stage-Rocked Big-Data Approach
Sign Up to like & getrecommendations! Published in 2018 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927618003410
Abstract: Obtaining an accurate and precise measure of orientation in a polycrystalline material is a crucial characterization step in making structure/property connections in functional materials. In the past, understanding polycrystalline texture was frequently explored using selected… read more here.
Keywords: stage rocked; orientation; electron channeling; orientation mapping ... See more keywords
Orientation Mapping by Electron Channeling (OMEC) and Hybrid Stage/Beam-Rocked Electron Channeling Patterns
Sign Up to like & getrecommendations! Published in 2018 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927618003665
Abstract: Orientation mapping of bulk, polycrystalline materials by electron backscatter diffraction (EBSD) has become an important and relatively pervasive analytical tool to link microstructure to material properties and performance. In contrast, techniques based on electron channeling… read more here.
Keywords: orientation mapping; channeling patterns; stage; electron channeling ... See more keywords
Sample Orientation for Electron Channeling Contrast Imaging
Sign Up to like & getrecommendations! Published in 2019 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927619003271
Abstract: Electron channeling contrast imaging (ECCI) is an SEM technique in which the variation of intensity of electrons backscattered from the sample surface allows visualization and quantification of crystalline defects such as dislocations, stacking faults, or… read more here.
Keywords: orientation; electron; electron channeling; beam ... See more keywords
Stage-Rocked Electron Channeling for Crystal Orientation Mapping
Sign Up to like & getrecommendations! Published in 2018 at "Scientific Reports"
DOI: 10.1038/s41598-018-23413-3
Abstract: Microstructural analysis by crystal orientation mapping of bulk functional materials is an essential and routine operation in the engineering of material properties. Far and away the most successfully employed technique, Electron Backscattered Diffraction (EBSD), provides… read more here.
Keywords: orientation mapping; stage rocked; electron channeling; crystal orientation ... See more keywords