Experimental and numerical investigations of electron characteristics in 2 MHz and 13.56 MHz inductively coupled hydrogen plasmas with an expansion region
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DOI: 10.1063/1.5006892
Abstract: The electron characteristics are investigated in 2 MHz and 13.56 MHz inductively coupled hydrogen discharges with an expansion region. The influence of the gas pressure and radio-frequency of the power source on the electron energy probability functions… read more here.
Keywords: coupled hydrogen; mhz mhz; electron characteristics; mhz inductively ... See more keywords