Solid-Phase Epitaxy of Perovskite High Dielectric PrAlO3 Films Grown by Atomic Layer Deposition for Use in Two-Dimensional Electronics and Memory Devices
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DOI: 10.1021/acsanm.9b02153
Abstract: An atomic layer deposition (ALD) process is reported for the growth of nanoscale PrAlO3 thin films for two-dimensional electronics and memory device applications using tris(isopropylcyclopentadieny... read more here.
Keywords: dimensional electronics; atomic layer; two dimensional; layer deposition ... See more keywords