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Published in 2021 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2021.3083935
Abstract: This paper presents a zeroth and first order perturbative analysis of prestressed electrostatic actuated Microelectromechanical systems (MEMS). Perturbation theory is used to calculate the deflection profile of various MEMS structures, from which the pull-in voltage…
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Keywords:
prestressed electrostatic;
deflection;
voltage;
pull voltage ... See more keywords