A Customized Nonlinear Micro-Flexure for Extending the Stable Travel Range of MEMS Electrostatic Actuator
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2019.2894669
Abstract: The stable travel range of parallel-plate electrostatic actuator with a linear suspension flexure is limited to a third of the nominal gap due to the pull-in instability resulting from the inherent nonlinear behavior of electrostatic… read more here.
Keywords: flexure; stable travel; force; electrostatic actuator ... See more keywords
Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems
Sign Up to like & getrecommendations! Published in 2023 at "Actuators"
DOI: 10.3390/act12040163
Abstract: Having benefited from technological developments, such as surface micromachining, high-aspect-ratio silicon micromachining and ongoing miniaturization in complementary metal–oxide–semiconductor (CMOS) technology, some electrostatic actuators became widely used in large-volume products today. However, due to reliability-related issues… read more here.
Keywords: inchworm motors; review; actuator systems; electrostatic actuator ... See more keywords