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Published in 2024 at "Nature Communications"
DOI: 10.1038/s41467-024-51787-8
Abstract: Biomimetic robots yearn for compliant actuators that are comparable to biological muscle in both functions and structural properties. For that, electrostatic actuators have been developed to imitate bio-muscle in features of fast response, high power,…
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Keywords:
dimensional impact;
muscle;
electrostatic actuators;
elastomer enhanced ... See more keywords
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Published in 2024 at "Journal of Microelectromechanical Systems"
DOI: 10.1109/jmems.2023.3331701
Abstract: The utilization of MEMS resonators in microelectronics has garnered significant attention, given their crucial role in a multitude of applications, including timing and sensing. Among the various types of resonators, tunable resonators are particularly noteworthy,…
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Keywords:
electrostatic actuators;
beam;
resonant frequency;
beam resonator ... See more keywords