Pull-in instability of a typical electrostatic MEMS resonator and its control by delayed feedback
Sign Up to like & getrecommendations! Published in 2017 at "Nonlinear Dynamics"
DOI: 10.1007/s11071-017-3653-4
Abstract: Pull-in instability of the electrostatic microstructures is a common undesirable phenomenon which implies the loss of reliability of micro-electromechanical systems. Therefore, it is necessary to understand its mechanism and then reduce the phenomenon. In this… read more here.
Keywords: typical electrostatic; mems resonator; instability typical; electrostatic mems ... See more keywords
Analysis of Electrostatic MEMS Using Energy-Charge Landscape
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Transactions on Electron Devices"
DOI: 10.1109/ted.2020.3018700
Abstract: A common way to analyze electrostatic microelectromechanical systems (MEMS) actuators is to use their energy-displacement landscape. Here, we describe an alternative approach to analyze electrostatic MEMS actuators using their energy-charge landscape. This technique involves coordinate… read more here.
Keywords: landscape; energy charge; electrostatic mems; energy ... See more keywords
Validation and Evaluation of a Behavioral Circuit Model of an Enhanced Electrostatic MEMS Converter
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DOI: 10.3390/mi13060868
Abstract: In this current study, the validation and evaluation of a behavioral circuit model of electrostatic MEMS converters are presented. The main objective of such a model is to accurately find the converter behavior through the… read more here.
Keywords: circuit model; circuit; model; behavioral circuit ... See more keywords
Electrostatic MEMS Two-Dimensional Scanning Micromirrors Integrated with Piezoresistive Sensors
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DOI: 10.3390/mi15121421
Abstract: The MEMS scanning micromirror requires angle sensors to provide real-time angle feedback during operation, ensuring a stable and accurate deflection of the micromirror. This paper proposes a method for integrating piezoresistive sensors on the torsion… read more here.
Keywords: mems two; sensor; piezoresistive sensor; two dimensional ... See more keywords