Electrostatic Micro-Electro-Mechanical-Systems (MEMS) Devices: A Comparison Among Numerical Techniques for Recovering the Membrane Profile
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DOI: 10.1109/access.2020.3008332
Abstract: In this work, numerical techniques based on Shooting procedure, Relaxation scheme and Collocation technique have been used for recovering the profile of the membrane of a $1D$ electrostatic Micro-Electro-Mechanical-Systems (MEMS) device whose analytic model considers… read more here.
Keywords: tex math; electrostatic micro; membrane; inline formula ... See more keywords