Highly Tunable Electrostatic Nanomechanical Resonators
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DOI: 10.1109/tnano.2017.2777519
Abstract: There has been significant interest toward highly tunable resonators for on-demand frequency selection in modern communication systems. Here, we report highly tunable electrostatically actuated silicon-based nanomechanical resonators. In-plane doubly clamped bridges, slightly curved as shallow… read more here.
Keywords: nanomechanical resonators; highly tunable; tunable electrostatic; electrostatic nanomechanical ... See more keywords