Review of Electrothermal Micromirrors
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DOI: 10.3390/mi13030429
Abstract: Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear… read more here.
Keywords: review electrothermal; electrothermal micromirrors; motion;