Development of TiN Vacuum-Gap Capacitor Lumped-Element Kinetic Inductance Detectors
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DOI: 10.1007/s10909-019-02309-0
Abstract: We report on the implementation of a vacuum parallel-plate capacitor manufactured using a straightforward process that allows to accurately set nanoscale vacuum gaps in order to reach fairly large capacitances with small footprints. Vacuum gaps… read more here.
Keywords: capacitor; vacuum; kinetic inductance; element kinetic ... See more keywords