Compact and ultrathin multi-element oxide films grown by temperature-controlled deposition and their surface-potential based transistor theoretical simulation model
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DOI: 10.1039/d0tc00506a
Abstract: Amorphous multi-element oxide films were grown using a facile temperature-controlled approach. The compact IMZO film was deposited and the size of voids formed in the film reduced greatly as compared with that of the pure… read more here.
Keywords: temperature controlled; oxide films; multi element; element oxide ... See more keywords