Preparation of ellipsoidal rod-shaped silica nanocomposite abrasives by Chromium ion/PEG200 induced method for sapphire substrates chemical mechanical polishing
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DOI: 10.1016/j.jallcom.2018.11.080
Abstract: Abstract Abrasive is vital to sapphire substrates chemical mechanical polishing and provides the most critical support for flattening of sapphire. This work proposed a method to prepare ellipsoidal rod-shaped silica nanocomposite abrasives in order to… read more here.
Keywords: shaped silica; silica nanocomposite; rod shaped; nanocomposite abrasives ... See more keywords