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Published in 2017 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2017.01.100
Abstract: Abstract Dual-wavelength light sources with stroboscopic illumination technique were applied in a process of photoelastic modulated ellipsometry to retrieve two-dimensional ellipsometric parameters of thin films on a silicon substrate. Two laser diodes were alternately switched…
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Keywords:
ellipsometric system;
dual wavelength;
fast dual;
using fast ... See more keywords