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Published in 2017 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2017.06.060
Abstract: Abstract Ellipsometry is a surface and film analytical technique which takes advantage of the fact that light reflecting from a surface undergoes a change in polarization state depending upon the geometric structure and materials of…
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Keywords:
three methods;
comparison three;
characterization thin;
films comparison ... See more keywords