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Published in 2021 at "Journal of Computational Electronics"
DOI: 10.1007/s10825-021-01672-0
Abstract: The characteristic of the microelectromechanical systems (MEMS) structures can be determined by using static, modal and harmonic analyses implemented with finite element method (FEM) software packages. In the current study, two different algorithms for the…
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Keywords:
algorithms open;
fem;
frequency;
open source ... See more keywords