Elucidation of ALD MgZnO deposition processes using low energy ion scattering
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DOI: 10.1116/1.5015958
Abstract: Low energy ion scattering (LEIS) provides an analytical tool for probing the surface composition and structure on the angstrom to nanometer scale. These length scales are central to the growth and processing of ultrathin films… read more here.
Keywords: energy; ion scattering; deposition; energy ion ... See more keywords