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Published in 2020 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.0c06212
Abstract: GeSn alloys have the potential of extending the Si photonics functionality in short-wave infrared (SWIR) light emission and detection. Epitaxial GeSn layers were deposited on a relaxed Ge buffer on Si(100) wafer by using high…
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Keywords:
magnetron sputtering;
detection;
epitaxial gesn;
gesn ... See more keywords