Investigation of Self-Heating Effect on the Void Embedded SOI MOSFETs
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DOI: 10.1109/jeds.2024.3495033
Abstract: Self-heating effect (SHE) in void embedded SOI (VESOI) MOSFET is analyzed using 3D finite-element method (FEM) to solve modified Fourier heat conduction equations. The induced void beneath the silicon channel results in a 42% increase… read more here.
Keywords: self heating; embedded soi; effect void; void embedded ... See more keywords