Progress of MEMS acoustic emission sensor: a review
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DOI: 10.1108/sr-06-2023-0232
Abstract: Purpose Based on the micro-electro-mechanical system (MEMS) technology, acoustic emission sensors have gained popularity owing to their small size, consistency, affordability and easy integration. This study aims to provide direction for the advancement of MEMS… read more here.
Keywords: mems acoustic; research; emission sensor; acoustic emission ... See more keywords