Structural and Elastic Properties of Empty-Pore Metalattices Extracted via Nondestructive Coherent Extreme UV Scatterometry and Electron Tomography.
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DOI: 10.1021/acsami.2c09360
Abstract: Semiconductor metalattices consisting of a linked network of three-dimensional nanostructures with periodicities on a length scale read more here.
Keywords: scatterometry; empty pore; electron tomography; elastic properties ... See more keywords