Quantum Endpoint Detection Based on QRDA
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DOI: 10.1007/s10773-017-3493-5
Abstract: Speech recognition technology is widely used in many applications for man - machine interaction. To face more and more speech data, the computation of speech processing needs new approaches. The quantum computation is one of… read more here.
Keywords: detection; speech; endpoint detection; based qrda ... See more keywords
Acoustic modulation signal recognition based on endpoint detection
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DOI: 10.1038/s41598-024-69934-y
Abstract: The modulation recognition technology for acoustic signals holds significant research importance in signal demodulation and communication signal reconnaissance, serving as a crucial component and key aspect. This paper investigates the modulation recognition technology for acoustic… read more here.
Keywords: recognition; endpoint detection; signal recognition; modulation signal ... See more keywords
Supervised Multivariate Kernel Density Estimation for Enhanced Plasma Etching Endpoint Detection
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Access"
DOI: 10.1109/access.2022.3155513
Abstract: The advancement of semiconductor technology nodes requires precise control of their manufacturing process, including plasma etching, which is highly important in terms of the yield, cost, and device performance. Endpoint detection (EPD) is an imperative… read more here.
Keywords: endpoint detection; multivariate kernel; plasma etching; density estimation ... See more keywords
An Endpoint Detection System for Ion Beam Etching Using Optical Emission Spectroscopy
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13020259
Abstract: An ion beam etching system with etching endpoint detection (EPD) capability based on optical emission spectroscopy (OES) was conceived, built, and tested. An expansion chamber was added on the right side of the etching chamber… read more here.
Keywords: system; endpoint detection; spectroscopy; emission ... See more keywords