Vegard's-law-like dependence of the activation energy of blistering on the x composition in hydrogenated a-SixGe1-x
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Alloys and Compounds"
DOI: 10.1016/j.jallcom.2018.05.269
Abstract: Abstract Surface quality is a key issue in semiconductor structures for device applications. Typical surface defects are blisters. Here we investigate on the relationship between the activation energy of blistering and the composition x in… read more here.
Keywords: law; activation energy; energy; composition ... See more keywords
Effects of He ion energy on blistering characteristics of Si sequentially implanted with H and He ions in various sequences
Sign Up to like & getrecommendations! Published in 2018 at "Surface and Coatings Technology"
DOI: 10.1016/j.surfcoat.2018.01.085
Abstract: Abstract As compared to the conventional smart-cut technology based on single H ion implantation, sequential implantation of H and He ions has been demonstrated to be effective in reducing the implantation fluence and the thermal… read more here.
Keywords: energy; blistering characteristics; sequential implantation; ion energy ... See more keywords