Engineering of dense arrays of Vertical Si1-x Ge x nanostructures
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DOI: 10.1088/1361-6528/aca419
Abstract: Vertical nanostructure technologies are becoming more important for the down scaling of nanoelectronic devices such as logic transistors or memories. Such devices require dense vertical nanostructured channel arrays (VNCA) that can be fabricated through a… read more here.
Keywords: si1; dense arrays; arrays vertical; dense ... See more keywords