Enhanced Vertical Sidewall Quality for Functional AlN Films in 3D Piezo MEMS Applications
Sign Up to like & getrecommendations! Published in 2025 at "Advanced Electronic Materials"
DOI: 10.1002/aelm.202500066
Abstract: Integrating piezoelectric materials onto the vertical surfaces of microelectromechanical systems (MEMS) microstructures enables three‐dimensional piezoelectric (3D piezoMEMS) devices, providing multi‐axis sensing and actuation capabilities with a reduced device footprint. Metal–organic chemical vapor deposition (MOCVD) is… read more here.
Keywords: quality; quality functional; vertical sidewall; enhanced vertical ... See more keywords
Wave Glider–Enhanced Vertical Seafloor Geodesy
Sign Up to like & getrecommendations! Published in 2019 at "Journal of Atmospheric and Oceanic Technology"
DOI: 10.1175/jtech-d-19-0095.1
Abstract: AbstractWe have developed a low-cost approach for accurately measuring short-term vertical motions of the seafloor and maintaining a continuous long-term record of seafloor pressure without the req... read more here.
Keywords: wave glider; enhanced vertical; seafloor; glider enhanced ... See more keywords