Enhancing Near-Infrared Photodetection Efficiency in SPAD With Silicon Surface Nanostructuration
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DOI: 10.1109/jeds.2018.2810509
Abstract: We propose a straightforward technique to increase the near-infrared photo-detection efficiency (PDE) in single photon avalanche photodiodes (SPAD) manufactured in CMOS industrial foundries, without any change in the usual semiconductor process flow. The mask used… read more here.
Keywords: photodetection efficiency; near infrared; surface; enhancing near ... See more keywords