High temperature surface Brillouin scattering study of mechanical properties of boron-doped epitaxial polysilicon
Sign Up to like & getrecommendations! Published in 2017 at "AIP Advances"
DOI: 10.1063/1.4976977
Abstract: A study of the mechanical properties of a boron-doped epitaxial polysilicon layer deposited on a Si (100) substrate specimen has been carried out by surface Brillouin scattering at high temperatures. This type of specimen is… read more here.
Keywords: properties boron; boron doped; doped epitaxial; study mechanical ... See more keywords