Influence of deposition rate on the structural properties of plasma-enhanced CVD epitaxial silicon
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DOI: 10.1038/srep43968
Abstract: Solar cells based on epitaxial silicon layers as the absorber attract increasing attention because of the potential cost reduction. In this work, we studied the influence of the deposition rate on the structural properties of… read more here.
Keywords: deposition; influence deposition; epitaxial silicon; deposition rate ... See more keywords