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Published in 2022 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.2c03151
Abstract: Nanoscale polycrystalline thin-film heterostructures are central to microelectronics, for example, metals used as interconnects and high-K oxides used in dynamic random-access memories (DRAMs). The polycrystalline microstructure and overall functional response therein are often dominated by…
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Keywords:
effects ferroelectric;
local epitaxial;
epitaxial templating;
templating effects ... See more keywords